METHOD FOR PROCESSING OUTPUT OF SCANNING TYPE PROBE MICROSCOPE, AND SCANNING TYPE PROBE MICROSCOPE

摘要

Incident light (19) emitted from a laser light source (18) is reflected on an upper surface of a cantilever (13), so that reflected light (19a) enters light detection means (20). Since the incident light (19) and the reflected light (19a) are in a plane not including a long axis of the cantilever (13), movements of the reflected light (19a) due to change in a deflection amount ¸ of the cantilever (13) and due to change in a fine vertical movement amount z thereof are different in direction on the light detection means (20). This enables the change in the deflection amount ¸ of the cantilever (13) and the change in the fine vertical movement amount z thereof to be separated from output of the light detection means (20).