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发明名称
METHOD OF FORMING METAL WIRING AND ETCHANT COMPOSITION USED IN THE SAME
摘要
申请公布号
KR101066216(B1)
申请公布日期
2011.09.20
申请号
KR20080014472
申请日期
2008.02.18
申请人
发明人
分类号
H01L21/28;C09K13/00;H01L21/027
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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