发明名称 Method for manufacturing semiconductor device
摘要 A chip provided with a layer for separation of a surface region and a hydrophilic surface is manufactured. One or both of a hydrophilic region and a hydrophobic region are formed on a substrate surface where the chip is placed. Liquid is dropped onto the hydrophilic region on the substrate surface, and the chip is placed thereon. The substrate and the chip are heated while being pressure-bonded so that the chip is fixed on the substrate surface, and then the surface region of the chip is separated. By providing a liquid layer in a position where the chip is placed, the chip can be placed on the substrate with high accuracy and thus productivity can be increased.
申请公布号 US8021960(B2) 申请公布日期 2011.09.20
申请号 US20100897045 申请日期 2010.10.04
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 TAKEMURA YASUHIKO
分类号 H01L21/30 主分类号 H01L21/30
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