发明名称 Method of manufacturing thin film transistor
摘要 A thin film transistor (TFT) and a method of manufacturing the same are provided. The TFT includes a transparent substrate, an insulating layer on a region of the transparent substrate, a monocrystalline silicon layer, which includes source, drain, and channel regions, on the insulating layer and a gate insulating film and a gate electrode on the channel region of the monocrystalline silicon layer.
申请公布号 US8021936(B2) 申请公布日期 2011.09.20
申请号 US20090382925 申请日期 2009.03.26
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 NOGUCHI TAKASHI;XIANYU WENXU;CHO HANS S.;YIN HUAXIANG
分类号 H01L21/00;H01L21/84 主分类号 H01L21/00
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