| 摘要 |
An interconnect terminal is formed on a semiconductor die by applying an electrically conductive material in an aerosol form, for example by aerosol jet printing. Also, an electrical interconnect between stacked die, or between a die and circuitry in an underlying support such as a package substrate, is formed by applying an electrically conductive material in an aerosol form, in contact with pads on the die or on the die and the substrate, and passing between the respective pads. In some embodiments a fillet is formed at the inside corner formed by an interconnect sidewall of the die and a surface inboard from pads on an underlying feature (underlying die or support); and the electrically conductive material passes over a surface of the fillet. |
