发明名称 LITHOGRAPHIC APPARATUS AND METHOD
摘要 <p>A detector to measure a property of radiation is disclosed. The detector comprises first and second luminescent uniaxial crystals each having an optic axis, the optic axis of the first uniaxial crystal being arranged such that it is substantially perpendicular to the optic axis of the second uniaxial crystal.</p>
申请公布号 KR20110103341(A) 申请公布日期 2011.09.20
申请号 KR20110021314 申请日期 2011.03.10
申请人 ASML NETHERLANDS B.V. 发明人 STOLK ROLAND PIETER;VAN DER VEEN PAUL
分类号 H01L21/027;G03F7/20 主分类号 H01L21/027
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