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发明名称
VERTICAL HEAT TREATMENT APPARATUS AND, ASSEMBLY OF PRESSURE DETECTION SYSTEM AND TEMPERATURE SENSOR
摘要
申请公布号
KR20110103326(A)
申请公布日期
2011.09.20
申请号
KR20110016381
申请日期
2011.02.24
申请人
TOKYO ELECTRON LIMITED
发明人
KOBAYASHI MAKOTO
分类号
H01L21/324;H01L21/205;H01L21/22
主分类号
H01L21/324
代理机构
代理人
主权项
地址
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