| 摘要 |
An imprint apparatus has a head unit with a fine structure. The head unit includes a fine imprint pattern layer including fine concavities and convexities, a resin layer on a face of the fine imprint pattern layer opposite to a face where the concavities and convexities are formed, a first pressurizing base member on a face of the resin layer opposite to a face contacting the fine imprint pattern layer, and a second pressurizing base member on a face of the first pressurizing base member opposite to a face contacting the resin layer. The resin layer has a modulus of elasticity smaller than that of the fine imprint pattern layer, and the first pressurizing base member has a modulus of elasticity smaller than that of the resin layer. A light source or a heat source may be further provided. The head unit may be light permeable. A replacement layer may be further provided for replacement.
|
