| 摘要 |
<p>PURPOSE: A surface detecting apparatus using polarization interference and the phase change detecting method between the polarized light are provided to precisely analyze the phase change between polarized lights by installing a polarization conversion device on the output terminal of a light waveguide. CONSTITUTION: An optical waveguide(240) changes the phase between two polarized lights through the change of a surface material. A 1/4 wavelength phase delay(250) delays the phase outputted from the optical waveguide. A polarized light(260) comprises an opaque region and filters the light. An optical detector(270) changes light intensity into an electric signal.</p> |
