| 发明名称 |
Sputtering target assembly and method of making same |
| 摘要 |
A method for producing a sputtering target assembly bonded to a backing plate. The method includes bonding a target (100) to a high strength backing plate (110) and further creating a vacuum seal between the target and the backing plate using friction stir welding processes.
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| 申请公布号 |
US8020748(B2) |
申请公布日期 |
2011.09.20 |
| 申请号 |
US20070310857 |
申请日期 |
2007.08.08 |
| 申请人 |
TOSO SMD, INC. |
发明人 |
IVANOV EUGENE Y.;THEADO ERICH |
| 分类号 |
B23K20/12 |
主分类号 |
B23K20/12 |
| 代理机构 |
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代理人 |
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