NOZZLE AND SUBSTRATE PROCESSING APPARATUS,申请号KR20040100285-传众专利搜索

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发明名称	NOZZLE AND SUBSTRATE PROCESSING APPARATUS
摘要
申请公布号	KR101065982(B1)	申请公布日期	2011.09.19
申请号	KR20040100285	申请日期	2004.12.02
申请人		发明人
分类号	G02F1/13;B05C11/06;B08B5/02;G02F1/1333;H01L21/304	主分类号	G02F1/13
代理机构		代理人
主权项
地址

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