发明名称 |
CRYSTALLIZATION APPARATUS, CRYSTALLIZATION METHOD, METHOD OF MANUFACTURING THIN FILM TRANSISTOR AND METHOD OF MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY APPARATUS |
摘要 |
<p>Provided are a crystallization apparatus and method, which prevent cracks from being generated, a method of manufacturing a thin film transistor (TFT), and a method of manufacturing an organic light emitting display apparatus. The crystallization apparatus includes a chamber for receiving a substrate, a first flash lamp and a second flash lamp, which are disposed facing each other within the chamber, wherein amorphous silicon layers are disposed on a first surface of the substrate facing the first flash lamp and a second surface of the substrate facing the second flash lamp, respectively.</p> |
申请公布号 |
KR20110102687(A) |
申请公布日期 |
2011.09.19 |
申请号 |
KR20100021836 |
申请日期 |
2010.03.11 |
申请人 |
SAMSUNG MOBILE DISPLAY CO., LTD. |
发明人 |
JIN, SEONG HYUN;CHANG, YOUNG JIN;OH, JAE HWAN;LEE, WON KYU |
分类号 |
H01L21/324;H01L29/786;H01L51/56 |
主分类号 |
H01L21/324 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|