发明名称 |
SEMICONDUCTOR DEVICE HAVING IMPROVED RELIABILITY |
摘要 |
A semiconductor includes a plurality of active regions that are separated from each other on a substrate by a device isolation layer and extend in a first direction, the active regions having two opposite ends and a center region; wordlines that are buried in and cross the active regions and extend in a second direction, which is different from the first direction, wherein a wordline that crosses an active region crosses between one of the two opposite ends and the center region of the active region; first contact plugs on the two opposite ends of the active regions, each contact plug overlapping a border between the active region and the device isolation layer; and second contact plugs formed on the first contact plugs. |
申请公布号 |
KR20110101979(A) |
申请公布日期 |
2011.09.16 |
申请号 |
KR20100021383 |
申请日期 |
2010.03.10 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
BAEK, CHEOL HO;HONG, HYEONG SUN;HWANG, YOO SANG |
分类号 |
H01L27/108;H01L21/8242 |
主分类号 |
H01L27/108 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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