| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vapor deposition apparatus capable of stabilizing film characteristics, even on an optical lens disposed at outer peripheral side of a dome. <P>SOLUTION: The vapor deposition apparatus deposits a film through vapor deposition onto an optical lens having a first plane and a second plane. The vapor deposition apparatus is equipped with: a vapor deposition source that injects a vapor deposition material for forming the film; a plurality of lens pallets on which a plurality of lenses can be mounted; and the dome that is located in the direction of injection from the vapor deposition source, has a prescribed slope based on the injection from the vapor deposition source and enables mounting of the plurality of lens pallets. The dome is capable of inverting the lens pallets mounted thereon. When the first plane of the optical lens is disposed on the vapor deposition source side, compared to the second pallet located at center side as an injection target, the first pallet located at outer peripheral side as an injection target has its end at the outer peripheral side positioned closer to the vapor deposition source than its end at the center side, based on the prescribed slope. <P>COPYRIGHT: (C)2011,JPO&INPIT |
