METHOD AND DEVICE FOR PRODUCING A PARYLENE COATING

摘要

The invention relates to a method for producing a parylene coating (2) on at least one surface (11) of at least one component (1), in which a first gas having parylene monomers (4) is provided and the parylene monomers are deposited on the at least one surface (11) of the component (1) by feeding the first gas having the parylene monomers (4) by means of a first nozzle (3) to at least one surface (11), wherein the component (1) is disposed in an environment having atmospheric pressure. The invention further relates to a device for producing a parylene coating.