发明名称 THIN FILM TRANSISTOR AND METHOD OF MANUFACTURING THIN FILM TRANSISTOR
摘要 PROBLEM TO BE SOLVED: To provide a thin film transistor whose on current can be stabilized, and to provide a method of manufacturing the thin film transistor. SOLUTION: An EL panel 1 has a structure such that a part of a laminate of a source electrode 6i (5i) and an impurity semiconductor film 6g (5g) of a thin film transistor such as a switch transistor 5 or drive transistor 5 used as a drive element, overlaps one end side of a channel protective film 6d (5d) which is large in film thickness. Consequently, back-gate effect operating on the channel protective film 6d (5d) covering a region to serve as a channel can be suppressed to suppress disorder of the channel, and an on current (Id) of the thin film transistor 6 (5) is made larger than before to be stabilized to a suitable value. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011181551(A) 申请公布日期 2011.09.15
申请号 JP20100041635 申请日期 2010.02.26
申请人 CASIO COMPUTER CO LTD 发明人 TANAKA KOICHI;MATSUMOTO HIROSHI
分类号 H01L29/786;H01L21/336;H01L29/41;H01L29/417;H01L51/50 主分类号 H01L29/786
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