发明名称 POSITION TESTING APPARATUS
摘要 A position testing apparatus includes a stage on which a piezoelectric element object is set, a through hole formed through the stage and covered with the piezoelectric element set on the stage according to a positioning state, and a flow measurement unit configured to draw air through the through hole from around the piezoelectric element and determine the positioning state of the piezoelectric element according to a flow rate of the drawn air. The position testing apparatus is capable of surely testing a positioning state of the piezoelectric element.
申请公布号 US2011219884(A1) 申请公布日期 2011.09.15
申请号 US201113033326 申请日期 2011.02.23
申请人 NHK SPRING CO., LTD. 发明人 OGAKI SHOGO;ANDO TAKASHI
分类号 G01F1/00 主分类号 G01F1/00
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