| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a piezoelectric-body element that does not contain lead and improves temperature dependency of piezoelectric characteristics. <P>SOLUTION: The piezoelectric-body element 10 is equipped with: a piezoelectric-body layer 20; and an upper electrode 31 and a lower electrode 32 respectively laminated on top and reverse surfaces thereof. The piezoelectric-body layer 20 is formed by laminating piezoelectric-body films 21 to 25 as five layers differing in composition in a film thickness direction thereof, and compositions thereof are different in steps and formed so as to be symmetrical about its center plane (a level plane shown by a chain line in Fig.2). For example, the piezoelectric-body films 21 and 25 among those piezoelectric-body films 21 to 25 comprise BZT-50% BCT, the piezoelectric-body films 22 and 24 comprise BZT-45% BCT, and the piezoelectric-body film 23 comprises BZT-40% BCT. With this constitution, the temperature dependency of piezoelectric characteristics of the piezoelectric-body layer 20 is averaged to be significantly improved. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
