| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacement amount detector capable of detecting a displacement amount of a detection object without being affected by an environmental factor. SOLUTION: Each oscillation circuit 2 is provided with a coil 5 whose inductance changes according to a change in a relative distance to the detection object 4, and outputs a signal of a frequency dependent on the inductance of the coil 5. A signal processing part 3 outputs an electric signal corresponding to the displacement amount y of the detection object 4 based on a relation between the oscillation frequency of each oscillation circuit 2 and the displacement amount y of the detection object 4 which is acquired by approximating the oscillation frequency of each oscillation circuit 2 with a polynomial of a predetermined order, respectively, while using the relative distance of each coil 5 to the detection object 4 as an independent variable, respectively, and by using a plurality of these approximate polynomials and eliminating coefficients of the polynomials. COPYRIGHT: (C)2011,JPO&INPIT
|
