| 摘要 |
PROBLEM TO BE SOLVED: To measure laser's resistance to an optical component as a specimen, in a noncontact and quantitative manner, and accurately analyze damaged mechanism. SOLUTION: A specimen damage analyzer includes a beam splitter 13 for separating a light pulse generated by a light source 11 into a pump light and a probe light; a delay-time adjusting section 15 for adjusting the delay times of the separated pump light and probe light; a first polarizing element 36 for controlling the polarization direction of the probe light to the pump light so that they are orthogonal to each other; an irradiation optical system for irradiating the specimen 2 with the pumped light and the probe light; a light-receiving element 31 for detecting a probe signal as the probe light reflected from the specimen 2; and a PC 33 for analyzing the reflectivity of the specimen 2, based on the probe signal detected by the light-receiving element 31. The height and/or the width of a reflectivity peak due to electron excitation for identifying its relaxation from the reflectivity. Correlation information between the previously-input degree of the damage and the height and/or the width of the reflectivity peak is verified, and the degree of the damage of the specimen is determined. COPYRIGHT: (C)2011,JPO&INPIT
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