发明名称 PIEZOELECTRIC ELEMENT, PIEZOELECTRIC SENSOR, ELECTRONIC DEVICE, AND METHOD FOR MANUFACTURING PIEZOELECTRIC ELEMENT
摘要 A piezoelectric element includes a support body having a displacing part capable of undergoing displacement, a lower electrode layer having a lower main electrode body and a lower electrode wire part with the lower main electrode body being formed on the support body and provided within the displacing part in a plan view and the lower electrode wire part being connected to the lower main electrode body and provided across an interior and an exterior of the displacing part, a first piezoelectric layer provided on the lower main electrode body, an upper electrode layer provided across the interior and exterior of the displacing part with at least a part of the upper electrode layer being layered on the first piezoelectric layer and insulated from the lower electrode layer, and a second piezoelectric layer provided on the support body to cover at least a part of the lower electrode wire part.
申请公布号 US2011221306(A1) 申请公布日期 2011.09.15
申请号 US201113042729 申请日期 2011.03.08
申请人 SEIKO EPSON CORPORATION 发明人 MATSUDA HIROSHI
分类号 H01L41/047;H01L41/22 主分类号 H01L41/047
代理机构 代理人
主权项
地址