发明名称 SOLUTION SUPPLYING UNIT AND SUBSTRATE TREATING APPARATUS HAVING THE SAME
摘要 A solution supplying unit includes a body, a first supplying tube and a second supplying tube. The body includes a chamber having a substantially circular cross-section to receive a solution and an out-flowing part connected to the chamber to flow out the solution. The first supplying tube is disposed at a side of the body, tangentially connected to the chamber, and supplying a first solution into the chamber to rotate the first solution in the chamber. The second supplying tube has an end portion, and supplying a second solution into the chamber to mix the first solution with the second solution. The end portion is formed through the body and is adjacent to a central axis of the body.
申请公布号 US2011220286(A1) 申请公布日期 2011.09.15
申请号 US201113044724 申请日期 2011.03.10
申请人 SEMES CO., LTD. 发明人 PARK GUI-SU;NOH HWAN-IK;KANG BYUNG-CHUL;CHO WON-PIL
分类号 C23F1/08;F15D1/00 主分类号 C23F1/08
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