发明名称 |
GAS INJECTION APPARATUS, GAS DISCHARGE APPARATUS, GAS INJECTION METHOD AND GAS DISCHARGE METHOD |
摘要 |
Disclosed herein is an apparatus including: a table configured to receive a container that stores an object therein, the container including a bottom surface provided with a positioning groove and including a charging inlet through which a gas is charged into the container; a positioning pin projecting from the table and adapted to engage with the positioning groove of the container; a nozzle configured to charge the gas into the container through the charging inlet; and a drive unit configured to move the nozzle into contact with the charging inlet of the container after the positioning pin is engaged with the positioning groove. |
申请公布号 |
KR20110101083(A) |
申请公布日期 |
2011.09.15 |
申请号 |
KR20110019338 |
申请日期 |
2011.03.04 |
申请人 |
SINFONIA TECHNOLOGY CO., LTD. |
发明人 |
NATSUME MITSUO;OCHIAI MITSUTOSHI;MIZOKAWA TAKUMI |
分类号 |
H01L21/67;B65G49/07;H01L21/677;H01L21/68 |
主分类号 |
H01L21/67 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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