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发明名称
VERFAHREN ZUM TRANSFER EINER SCHICHT GESPANNTEN HALBLEITERMATERIALS
摘要
申请公布号
AT524827(T)
申请公布日期
2011.09.15
申请号
AT20030762846T
申请日期
2003.07.09
申请人
S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES
发明人
GHYSELEN, BRUNO;BENSAHEL, DANIEL;OSTERNAUD, BENEDICTE
分类号
H01L21/20;H01L21/762;H01L21/02;H01L27/12;H01L29/10
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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