| 摘要 |
PROBLEM TO BE SOLVED: To obtain flow of replacement gas in a stable laminar state without disturbance by suppressing pressure fluctuation of the replacement gas in a supply pipe. SOLUTION: A substrate storage pod 1 includes a body container 3 having a hollow part for storing a substrate, and an opening, a lid member 2 which is inserted into and engaged with the opening and sealing the opening, a buffer space defined inside the lid member, an air supply port for supplying the replacement gas to the buffer space and a plurality of holes which are arranged so as to establish communication between an inner face of the lid member confronting the hollow part of the body container and the buffer space while being inserted into and engaged with the opening of the body container and send the replacement gas supplied to the buffer space to the hollow part. COPYRIGHT: (C)2011,JPO&INPIT |
