VAPOR DEPOSITION MASK, VAPOR DEPOSITION APPARATUS AND VAPOR DEPOSITION METHOD

摘要

Disclosed is a vapor deposition mask for patterning a thin film (3) on a substrate (10) by vapor deposition of vapor deposition particles through a plurality of stripe-shaped openings (K). The vapor deposition mask comprises a frame (65), a plurality of mask layers (70) provided so as to be superimposed on each other within that frame and support layers (71) provided between these mask layers (70). The mask layers (70) are formed by stretching a plurality of mask wires (72) to form a striped shape, and the support layers (71) are formed by stretching a plurality of support wires (74) that cross the mask wires (72). A plurality of through-spaces (73a) is formed so as to pass through all of the plurality of mask layers (70) linearly by superimposing a plurality of spaces (73) in each of the plurality of mask layers (70), and the openings (K) are formed by these through-spaces (73a).