| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To prevent acceleration of degradation of a cable connected with a movable part disposed in a vacuum chamber. <P>SOLUTION: A cable for vacuum treatment device includes: one or more signal lines 10; insulating fixing parts 20, 21 made of insulating materials, internally containing one or more signal lines 10 not in contact with each other, and fixing one or more signal lines 10; shielded wires 30 covering the periphery of the insulating fixing parts 20, 21; a first coating layer 40 made of an insulating material and covering the periphery of the shielded wires 30; and a second coating layer 60 disposed to cover the periphery of the first coating layer 40 via a spacer 50 disposed in a part of an outer surface of the first coating layer 40 and is disposed in the vacuum chamber. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
