TARGET FOR USE IN ULTRAVIOLET GENERATION, AND ELECTRON BEAM EXCITATION ULTRAVIOLET LIGHT SOURCE

摘要

PROBLEM TO BE SOLVED: To provide such a target for use in ultraviolet generation as can improve the ultraviolet generation efficiency, and to provide an electron beam excitation ultraviolet light source.

SOLUTION: The target 10 for use in ultraviolet generation includes a light-emitting layer 3 that generates ultraviolet light UV on receiving an electron beam EB. The light-emitting layer 3 contains Al, Ga, and N in the composition, and is doped with an impurity such as Si or the like, and has a carrier density of preferably from 6×1016(cm-3) to 2×1018(cm-3).

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