发明名称 SEMICONDUCTOR DEVICE
摘要 According to one embodiment, a semiconductor device provided with a structure, which prevents withstand voltage deterioration and may be manufactured at a low cost, is provided. The semiconductor device is provided with a semiconductor substrate, a first conductive type semiconductor layer formed of silicon carbide formed on the substrate, an active region formed on a surface of the semiconductor layer, a second conductive type first semiconductor region formed on the surface of the semiconductor layer so as to surround the active region, a second semiconductor region provided on the surface of the semiconductor layer so as to contact the outside of the first semiconductor region to surround the first semiconductor region in which a second conductive type impurity region having impurity concentration and a depth identical to those of the first semiconductor region is formed into a mesh shape, a first electrode provided on the active region, and a second electrode provided on a backside of the semiconductor substrate.
申请公布号 US2011220913(A1) 申请公布日期 2011.09.15
申请号 US20100876713 申请日期 2010.09.07
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 HATAKEYAMA TETSUO
分类号 H01L29/38 主分类号 H01L29/38
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