| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electronic device having excellent characteristics and high reliability. <P>SOLUTION: The electronic device 100 includes: a substrate 10; an inter-layer insulating layers 30a, 30b, and 30c formed on the upper part of the substrate 10 and having a cavity 32; a functional element 20 stored in the cavity 32; a first coating layer 40 formed on the upper part of the cavity 32; a resin layer 50 formed, avoiding the upper part of the cavity 32, on the upper part of the inter-layer insulating layers 30a, 30b, and 30c; and a second coating layer 60 formed on the upper part of the first coating layer 40. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
