| 摘要 |
<p>A liquid immersion member (3) can form an immersion space (LS) such that an optical path (K) of exposure light (EL) is filled with a liquid (LQ). The liquid immersion member comprises: a recovery port (18), which recovers at least some of the liquid on an object (P) disposed such that it faces an emergent surface (7) wherefrom the exposure light emerges; a recovery passageway (19), wherein flows the liquid recovered via the recovery port; a first suction port (21), which faces the recovery passageway and suctions only a gas from the recovery passageway; and a second suction port (22), which faces the recovery passageway and suctions the liquid from the recovery passageway.</p> |
