METHOD AND APPARATUS FOR LINEAR PAD CONDITIONING,申请号KR20117014644-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR LINEAR PAD CONDITIONING
摘要
申请公布号	KR20110101168(A)	申请公布日期	2011.09.15
申请号	KR20117014644	申请日期	2009.11.17
申请人	APPLIED MATERIALS, INC.	发明人	YILMAZ ALPAY;GOLUBOVSKY EDWARD;RANGARAJAN JAGAN
分类号	H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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