| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a floating and carrying device having a new configuration capable of simplifying a mechanism and moving a substrate to the carrying direction by using small power. <P>SOLUTION: The floating and carrying device includes a carrying unit 57 applying thrust force to the substrate W during floating and carrying of the substrate W. The carrying unit 57 includes a unit case 81, a drive actuator 82a, a drive pulley 86, an oscillation frame 84, an oscillation actuator 83, a movable pulley 87 capable of changing the vertical position along with the oscillation of the oscillation frame 84, an endless belt 88, a carrying roller 63a capable of changing the vertical position together with the movable pulley 87, and a fan unit 90. When the carrying roller 63a is lifted, the carrying roller 63a is brought into contact with the substrate W to apply thrust force to the substrate W. During lowering, the carrying roller 63a is separated from the substrate W so as not to apply thrust force to the substrate W. <P>COPYRIGHT: (C)2011,JPO&INPIT |
