| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a piezoelectric film durable for long-term drive, a method of manufacturing the same, a piezoelectric element, and a liquid ejection apparatus. <P>SOLUTION: The piezoelectric film is formed on a substrate by a vapor deposition method without generating grain boundaries which are substantially parallel to the substrate and are caused by lamination. In the piezoelectric film, a crystal axis direction of a (100) plane direction of each of crystals constituting the piezoelectric film is inclined from a normal of the surface of the substrate by 6°-45°. This method of manufacturing the same, this piezoelectric element including the same, and this liquid ejection apparatus are also provided. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
