| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an infrared sensor having a structure using a pyroelectric element, and thinned. <P>SOLUTION: The thin-film pyroelectric element 14, made of lead zirconate titanate, is provided on a silicon substrate 2 and can be formed by a sol-gel method. The sol-gel method can reduce a thickness of the pyroelectric element 14 in comparison with a method for forming the pyroelectric element 14 by sintering a powder raw material. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
