| 摘要 |
PROBLEM TO BE SOLVED: To provide a suction device which does not cause a warp or a partial area deformation in a workpiece. SOLUTION: The suction device 20 for sucking the workpiece 5 includes: a suction plate 21; a porous suction part 22 arranged at the suction plate 21 and formed in a frame shape along an outline of the workpiece 5; and a negative pressure generation part 25 communicating to the porous suction part 22. As a result, since a part to suck the workpiece 5 is disposed near the outline of the workpiece 5 and an area to suck is wide, the suction device can carry out the suction without having the warp or the partial area deformation in the workpiece 5. Then, the suction device can prevent a cracking in the workpiece 5 without applying unnecessary stress to the workpiece 5. COPYRIGHT: (C)2011,JPO&INPIT |
