SCRIBING DEVICE FOR SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a scribing device for a substrate securing exact line of a cutting line formed by a cutter.

SOLUTION: The scribing device comprises a plurality of sliders provided to slide along a guide rail 22 crossing just above a traveling passage of a table 3 for holding the substrate, a scribing tool provided to move up and down in each slider and a camera 31 mounted on each slider to read each scribe position mark (a) and an alignment mark of the substrate. A correction value is calculated from a distance between the scribing center line and the scribing standard center in the completion of the scribing by linking the rotation of the table to correct scribing processing deviation accompanying the reading of alignment marks by the cameras with the movement of the slider to a correction position by a traverse moving means to calculate and correct the scribing processing deviation by the reading of scribe marks by the camera and short trial cuts by the scribing tool. The correction value is subtracted or added from or to the moving distance of the scribing tool for next scribing.

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