| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To sufficiently prevent a substrate W from being damaged by avoiding the interference of the lateral end surface of the substrate W with a floating unit 33 or the like even if a deformation such as warpage occurs on the substrate W. <P>SOLUTION: A plurality of spray nozzles 45 are disposed above a transportation area TA partitioned by a plurality of floating units 33 at intervals in the transportation direction. The plurality of spray nozzles 45 spray air from the upper side toward the lateral center of the substrate so as to generate an upward forces at the lateral ends of the substrate W using, as a fulcrum, an air accumulation layer S generated between either of the floating units 33 and the substrate W. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
