发明名称 SEMICONDUCTOR LIGHT EMITTING ELEMENT AND METHOD FOR MANUFACTURING THE SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a semiconductor light emitting element improved in light extraction efficiency, and a method for manufacturing the same. <P>SOLUTION: The method includes the steps of: forming a first laminated film in which a p-type nitride semiconductor layer, an active layer with a multiple quantum well structure of a nitride semiconductor, and an n-type nitride semiconductor layer laminated on a first substrate 30 in this order; forming an n-electrode 44 on a top surface of the n-type nitride semiconductor layer; and forming unevenness on the top surface of the n-type nitride semiconductor layer by wet-etching the top surface of the n-type nitride semiconductor layer using an alkaline fluid except a region where the n-electrode is formed. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011181834(A) 申请公布日期 2011.09.15
申请号 JP20100046883 申请日期 2010.03.03
申请人 TOSHIBA CORP 发明人 ZAIMA KOTARO;GOTODA TORU;OKA TOSHIYUKI;NUNOGAMI SHINYA
分类号 H01L33/32;H01L21/306;H01L33/22 主分类号 H01L33/32
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