发明名称 STRESS RESISTANT MICRO-VIA STRUCTURE FOR FLEXIBLE CIRCUIT
摘要 <p><P>PROBLEM TO BE SOLVED: To provide metal interconnect connection of high reliability. <P>SOLUTION: A plurality of vias (24) are formed through a polyimide flex layer (22) and an adhesive layer (23) correspondingly to respective die pads (14). A plurality of metal interconnects (28) are formed on the polyimide flex layer (22), and each metal interconnect (28) has a cover pad (31) covering a portion of a top surface (30) of the polyimide flex layer (22), a sidewall (36) extending down from the cover pad (31) and through the via (24) along a perimeter thereof, and a base (34) connected to the sidewall (36) and forming an electrical connection with a respective die pad (14). Each of the base (34) and the sidewall (36) is formed so as to have a thickness that is equal to or greater than a thickness of the adhesive layer (23). <P>COPYRIGHT: (C)2011,JPO&INPIT</p>
申请公布号 JP2011181923(A) 申请公布日期 2011.09.15
申请号 JP20110036498 申请日期 2011.02.23
申请人 GENERAL ELECTRIC CO 发明人 GORCZYCA THOMAS BERT;SAIA RICHARD JOSEPH;MCCONNELEE PAUL ALAN
分类号 H01L23/12;H01L21/60 主分类号 H01L23/12
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