IMAGE PROCESSING METHOD

摘要

The present invention provides an image processing method of a secondary ion mass spectrometry (SIMS) system which combines a short-pulsed and converged primary ion beam column and a time-of-flight (TOF) mass spectrometer. A shape of the primary beam irradiated on a sample is determined by numerical calculation or practical experiment process (S108); and the blurring function derived from the shape is employed to restore a two-dimensional image of signal intensities based on a ratio of mass to an electric charge (m/e) in order to reduce the blurring of the image (S110-S111).