| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device for a microscope capable of preventing incorrect inspection; and to provide an inspection method by the microscope. SOLUTION: In this inspection device 100 for the microscope, a sample P is held by a sample stage 232a, a cooling atmosphere is formed around the sample stage 232a by air flow F225a, and normal temperature-drying air flow is formed around the cooling atmosphere by the air flow F21 and air flow F245. The optical system of the microscope is penetrated through holes 211, 221 and 251. Thus, even under an open-system environment, the sample P can be inspected accurately. COPYRIGHT: (C)2011,JPO&INPIT |
