| 摘要 |
PROBLEM TO BE SOLVED: To provide a microscope apparatus and an observation position reproduction method, which can reproduce an observation position of a circular sample with high accuracy. SOLUTION: The microscope apparatus includes: a center position calculation part 201 that calculates coordinates of a center position of the circular sample 103 based on a picked-up image of the circular sample 103; a pattern recognition part 202 that recognizes a pattern image of a predetermined area based on the coordinates of the center position of the circular sample 103 from the picked-up image of the circular sample 103; a rotational shift angle calculation part 204 that calculates a rotational shift angle between a first pattern image recognized by the pattern recognition part 202 from the picked-up image of the circular sample 103 obtained in a first period, and a second pattern image recognized by the pattern recognition part 202 from the picked-up image of the circular sample 103 obtained in a second period later than the first period; and a position reproduction part 205 which corrects a rotational shift of the circular sample 103 based on the rotational shift angle, and reproduces a position of the circular sample 103 in the first period. COPYRIGHT: (C)2011,JPO&INPIT
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