| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a scale for an optical encoder that is processed with high productivity by small laser energy, is stable to the environmental change, and has small reflective stray light. SOLUTION: This method of manufacturing the scale for the optical encoder includes a step of preparing a laminated material where a flat base material 1 constituted by metal tape, a black foundation layer 2 made of light absorbing material are stacked, and a metal film 3 made of light reflecting material, and a step of radiating a laser beam to the metal film 3 and forming a periodic opening region 5 from which the black foundation layer 2 is exposed as the scale. COPYRIGHT: (C)2011,JPO&INPIT
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