| 摘要 |
PROBLEM TO BE SOLVED: To provide an image comparison method and an image comparison program which facilitate comparison of a pattern on an actual image, with a pattern on original CAD data and enable a corresponding relation to be readily determined on actual image, even if there are plurality of images with similar pattern widths. SOLUTION: The image comparison method includes a step of extracting the edges of a line and a space composing a pattern from an actual image on which a sample is photographed; a step of measuring the distance between the edges, corresponding to either or both of width or/and length of the line and space on the basis of the extracted line and space edges; a step of generating a corrected CAD image, by calculating a correction factor consisting of a ratio of either or both of the line and space on the actual image or/and the line and space on the CAD image generated from the original CAD data for either or both of width or/and length between measured line and space edges; and a step of superimposing the generated corrected CAD image on the actual image for viewing on a display. COPYRIGHT: (C)2011,JPO&INPIT
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