| 摘要 |
PROBLEM TO BE SOLVED: To provide a small, low-cost laser radar device having a high light-receiving sensitivity and high distance-measuring accuracy. SOLUTION: The laser radar device 10 includes: a base frame 12 constituting a device body; a light source 14, secured at a predetermined position of the base frame 12 and emitting a laser beam; and a light-scanning device 16 scanning light emitted from the light source 14 toward an object not shown. The light scanning device 16 contains a movable plate (reflecting mirror) and a torsion bar that is integrally formed from a silicon substrate by the semiconductor microprocessing method, and has a photodiode integrally formed at the center of the movable plate. A reflected light 22 from the object is received directly received by the photodiode without having to go via an optical component. COPYRIGHT: (C)2011,JPO&INPIT
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