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发明名称
BEIDSEITIG MIKROSTRUKTURIERTER, ORTSEMPFINDLICHER DETEKTOR
摘要
申请公布号
AT522936(T)
申请公布日期
2011.09.15
申请号
AT20020764578T
申请日期
2002.06.05
申请人
FORSCHUNGSZENTRUM JUELICH GMBH
发明人
PROTIC, DAVOR;KRINGS, THOMAS;SCHLEICHERT, RALF
分类号
G01T1/24;H01L31/115;G01T1/29;H01L27/00;H01L27/14;H01L27/144;H01L27/146;H01L31/0288;H01L31/10;H01L31/105;H01L31/117;H01L31/16;H01L31/18
主分类号
G01T1/24
代理机构
代理人
主权项
地址
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