ULTRASONIC TRANSDUCER AND ULTRASONIC DIAGNOSTIC DEVICE USING SAME

摘要

Disclosed is an ultrasonic transducer provided with a first electrode, a first insulating film arranged on the first electrode, a hollow portion arranged on the first insulating film and provided with an upper surface and a lower surface, a second insulating film arranged on the hollow portion, and a second electrode arranged on the second insulating film, wherein the transducer is provided with a first conductive film arranged on the lower surface side of the hollow portion and a second conductive film arranged on the upper surface side of the hollow portion, and the first conductive film and the second conductive film are arranged so as to overlap, when viewed from above, with an area where the upper surface and the lower surface of the hollow portion are brought into contact at the time of driving, and so as not to overlap, when viewed from above, with each other. Thereby, a preferable structure and an ultrasonic diagnostic device using the structure are provided, so that, even if the upper surface of the hollow portion is in contact with the lower surface of the hollow portion, the concentration of electric fields and currents to the insulating film at the contact portion can be suppressed, and charge injection to the insulating film and reduction of dielectric strength voltage can be suppressed.