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发明名称
PLASMA REACTOR FOR ABATEMENT OF HAZARDOUS MATERIAL AND DRIVING METHOD THEREOF
摘要
申请公布号
KR101065013(B1)
申请公布日期
2011.09.15
申请号
KR20090098892
申请日期
2009.10.16
申请人
发明人
分类号
H01L21/3065;H01L21/302
主分类号
H01L21/3065
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