VACUUM PROCESSING APPARATUS AND PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide an effective method of controlling transfer in a vacuum processing apparatus with a linear tool configuration in which a plurality of transfer robots are provided to a transfer mechanism to which a processing chamber is coupled and in which a workpiece is passed between the plurality of transfer robots.

SOLUTION: The vacuum processing apparatus has a plurality of control methods, and includes a means for determining whether the transfer robot is rate-controlling or the chamber is rate-controlling based on the processing time of the workpiece and switching to a control method corresponding to the rate-controlling section.

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